CMOS-MEMS Probe Arrays for Tip-Based Nanofabrication
نویسندگان
چکیده
منابع مشابه
Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe
Atomic force microscope (AFM) equipped with diamond-like carbon (DLC)-coated Si probe has been used for scratch nanolithography on Si surfaces. The effect of scratch direction, applied tip force, scratch speed, and number of scratches on the size of the scratched geometry has been investigated. The size of the groove differs with scratch direction, which increases with the applied tip force and...
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